Fabricating Radial Groove Gratings Using Projection Photolithography

Projection photolithography has been used as a fabrication method for radial grove gratings. Use of photolithographic method for diffraction grating fabrication represents the most significant breakthrough in grating technology in the last 60 years, since the introduction of holographic written gratings. Unlike traditional methods utilized for grating fabrication, this method has the advantage of producing complex diffractive groove contours that can be designed at pixel-by-pixel level, with pixel size currently at the level of 45 45 nm. Typical placement accuracy of the grating pixels is 10 nm over 30 nm. It is far superior to holographic, mechanically ruled or direct e-beam written gratings and results in high spatial coherence and low spectral cross-talk. Due to the smooth surface produced by reactive ion etch, such gratings have a low level of randomly scattered light. Also, due to high fidelity and good surface roughness, this method is ideally suited for fabrication of radial groove gratings. The projection mask is created using a laser writer. A single crystal silicon wafer is coated with photoresist, and then the projection mask, with its layer of photoresist, is exposed for patterning in a stepper or scanner. To develop the photoresist, the fabricator either removes the exposed areas (positive resist) of the unexposed areas (negative resist). Next, the patterned and developed photoresist silicon substrate is subjected to reactive ion etching. After this step, the substrate is cleaned. The projection mask is fabricated according to electronic design files that may be generated in GDS file format using any suitable CAD (computer-aided design) or other software program. Radial groove gratings in off-axis grazing angle of incidence mount are of special interest for x-ray spectroscopy, as they allow achieving higher spectral resolution for the same grating area and have lower alignment tolerances than traditional in-plane grating scheme. This is especially critical for NASA Constellation- X project that will utilize hundreds of gratings all of which need to be precisely aligned for x-ray observation of space

Adaptable Diffraction Gratings With Wavefront Transformation

Diffraction gratings are optical components with regular patterns of grooves, which angularly disperse incoming light by wavelength. Traditional diffraction gratings have static planar, concave, or convex surfaces. However, if they could be made so that they can change the surface curvature at will, then they would be able to focus on particular segments, self-calibrate, or perform fine adjustments. This innovation creates a diffraction grating on a deformable surface. This surface could be bent at will, resulting in a dynamic wavefront transformation. This allows for self-calibration, compensation for aberrations, enhancing image resolution in a particular area, or performing multiple scans using different wavelengths. A dynamic grating gives scientists a new ability to explore wavefronts from a variety of viewpoints

Focusing Diffraction Grating Element with Aberration Control

Diffraction gratings are optical components with regular patterns of grooves, which angularly disperse incoming light by wavelength in a single plane, called dispersion plane. Traditional gratings on flat substrates do not perform wavefront transformation in the plane perpendicular to the dispersion plane. The device proposed here exhibits regular diffraction grating behavior, dispersing light. In addition, it performs wavelength transformation (focusing or defocusing) of diffracted light in a direction perpendicular to the dispersion plane (called sagittal plane). The device is composed of a diffraction grating with the grooves in the form of equidistant arcs. It may be formed by defining a single arc or an arc approximation, then translating it along a certain direction by a distance equal to a multiple of a fixed distance ("grating period") to obtain other groove positions. Such groove layout is nearly impossible to obtain using traditional ruling methods, such as mechanical ruling or holographic scribing, but is trivial for lithographically scribed gratings. Lithographic scribing is the newly developed method first commercially introduced by LightSmyth Technologies, which produces gratings with the highest performance and arbitrary groove shape/spacing for advanced aberration control. Unlike other types of focusing gratings, the grating is formed on a flat substrate. In a plane perpendicular to the substrate and parallel to the translation direction, the period of the grating and, therefore, the projection of its k-vector onto the plane is the same for any location on the grating surface. In that plane, no waveform transformation by the grating k-vector occurs, except of simple redirection

Gratings Fabricated on Flat Surfaces and Reproduced on Non-Flat Substrates

A method has been developed for fabricating gratings on flat substrates, and then reproducing the groove pattern on a curved (concave or convex) substrate and a corresponding grating device. First, surface relief diffraction grating grooves are formed on flat substrates. For example, they may be fabricated using photolithography and reactive ion etching, maskless lithography, holography, or mechanical ruling. Then, an imprint of the grating is made on a deformable substrate, such as plastic, polymer, or other materials using thermoforming, hot or cold embossing, or other methods. Interim stamps using electroforming, or other methods, may be produced for the imprinting process or if the same polarity of the grating image is required. The imprinted, deformable substrate is then attached to a curved, rigid substrate using epoxy or other suitable adhesives. The imprinted surface is facing away from the curved rigid substrate. As an alternative fabrication method, after grating is imprinted on the deformable substrate as described above, the grating may be coated with thin conformal conductive layer (for example, using vacuum deposition of gold). Then the membrane may be mounted over an opening in a pressured vessel in a manner of a membrane on a drum, grating side out. The pressure inside of the vessel may be changed with respect to the ambient pressure to produce concave or convex membrane surface. The shape of the opening may control the type of the surface curvature (for example, a circular opening would create spherical surface, oval opening would create toroidal surface, etc.). After that, well-known electroforming methods may be used to create a replica of the grating on the concave or convex membrane. For example, the pressure vessel assembly may be submerged into an electro-forming solution and negative electric potential applied to the metal coated membrane using an insulated wire. Positive electric potential may be then applied to a nickel or other metal plate submerged into the same solution. Metal ions would transfer from the plate through the solution into the membrane, producing high fidelity metal replica of the grating on the membrane. In one variation, an adhesive may be deposited on the deformable substrate, and then cured without touching the rigid, curved substrate. Edges of the deformable substrate may be attached to the rigid substrate to ensure uniform deformation of the deformable substrate. The assembly may be performed in vacuum, and then taken out to atmospheric pressure conditions to ensure that no air is trapped between the deformable and rigid substrates. Alternatively, a rigid surface with complementary curvature to the rigid substrate may be used to ensure uniform adhesion of the deformable substrate to the rigid substrate. Liquid may be applied to the surface of the deformable substrate to uniformly distribute pressure across its surface during the curing or hardening of the adhesive, or the film may be pressed into the surface using a deformable object or surface. After the attachment is complete, the grooves may be coated with reflective or dielectric layers to improve diffraction efficiency

Single integrated device for optical CDMA code processing in dual-code environment

We report on the design, fabrication and performance of a matching integrated optical CDMA encoder-decoder pair based on holographic Bragg reflector technology. Simultaneous encoding/decoding operation of two multiple wavelength-hopping time-spreading codes was successfully demonstrated and shown to support two error-free OCDMA links at OC-24. A double-pass scheme was employed in the devices to enable the use of longer code length

Demonstrations of mode conversion using Anti-Symmetric waveguide Bragg gratings

Abstract: We experimentally demonstrate a novel grating which only produces reflection with mode conversion in a two-mode waveguide. That characteristic can improve the performance of optical devices that currently use tilted Bragg gratings to provide the mode conversion. Tilted Bragg gratings produce also reflections without mode conversion which increases noise and crosstalk of the optical device

Integration of encoder / decoder for avionic OCDMA by holographic Bragg reflectors

Integrated holographic en/decoders are proposed to provide wavelength-hopping time-spreading codes for optical-code division-multiple-access avionic systems. A prototype device employs two holographic Bragg reflectors to perform data en/decoding with two complementary diagonal 16-chip temporal-spectral codes

Integration of dual-code optical CDMA encoder and decoder by holographic Bragg reflectors

A matching integrated OCDMA encoder-decoder pair based on holographic Bragg reflector technology was fabricated. Simultaneous en/decoding operation of two wavelength-hopping time-spreading codes was successfully performed at OC-24. A double-pass scheme was employed for longer code-length

Integrated holographic encoder / decoder for 2D optical CDMA

An integrated holographic en/decoder for wavelength hopping and time spreading is demonstrated. The device employs two holographic Bragg reflectors and allows one to en/decode data with two complementary diagonal 16-chip temporal-spectral codes

Novel multi-code processing platform for wavelength-hopping time-spreading optical CDMA : a path to device miniaturization and enhanced network functionality

Cost-effective, robust, code-processing photonic devices are essential for the adoption of optical code-division multiple access in future commercial and military network applications. Progress in several technology platforms for code processing is summarized. In particular, we focus on developments in a technology platform based on holographic Bragg reflectors that allow the processing of multiple codes simultaneously, with low footprint. Results of simultaneous en/decoding of two wavelength-hopping time-spreading codes using a single device are presented. Several applications are presented where multicode-processing capability can result in significant simplification of node and system architectures and, thus, provide feasible implementation of schemes to obtain enhanced network performance such as security and scalability